The 83rd JSAP Autumn Meeting 2022

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[21p-C106-1~11] 6.5 Surface Physics, Vacuum

Wed. Sep 21, 2022 1:30 PM - 4:30 PM C106 (C106)

Akitaka Yoshigoe(JAEA), Kei Mitsuhara(KOBELCO RESEARCH INSTITUTE, INC.)

3:30 PM - 3:45 PM

[21p-C106-8] Cathodoluminescence Properties from Ion-milled Znic Oxide Surfaces

Kei Hosomi1,2, Wataru Inami1,2, Yoshimasa Kawata1,2 (1.Shizuoka Univ., 2.CREST)

Keywords:zinc oxide, cathodoluminescence imaging, ion beam

ZnO is a possible candidate for a nanometric light source for an electron beam excitation assisted (EXA) optical microscope due to its highly efficient ultraviolet emission. The EXA system uses a focused elecron beam to generate a light spot several tens of nanometers in diameter. This study employs an ion milling procedure to flatten the surfaces of the ZnO thin film for a nanometric homogeneous light source.