[21p-C206-1~13] 7.1 X-ray technologies

[21p-C206-1] Design of high diffraction efficiency and high resolution soft X-ray laminar type multilayer gratings for 2-4 keV region (II)

〇Masato Koike^1,2,3, Tadashi Hatano², Alexander Pirozhkov¹, Yoshihiro Ueno⁴, Masami Terauchi² (1.QuBS, QST, 2.IMRAM, Tohoku Univ., 3.Dept. of Eng., Osaka Metro. Univ., 4.Tech. Res. Lab., Shimadzu Corp.)

Keywords:diffraction graing, soft X-ray multilayer, diffraction efficiency

We have been investigating the highest possible diffraction efficiency and resolution in a region of 2 to 4 keV assuming the technologies of fabricating grating grooves and multilayer coating. This time, we report the design of multilayer gratings with mlltilayer of a so-called super mirror-type structure consisting of three kinds of layers coated on a laminar-type diffraction grating having a groove density of 3,200 lines/mm and groove depth of 2.5 nm.