[21p-C206-1~13] 7.1 X-ray technologies

[21p-C206-2] Development of the soft x-ray laser irradiation beamline with an intensity monitor

〇Masahiko Ishino¹, Thanh-Hung Dinh¹, Tadashi Hatano², Noboru Hasegawa¹, Masaharu Nishikino¹ (1.QST, 2.Tohoku Univ.)

Keywords:soft x-ray laser, multilayer beam-splitter, intensity monitor

We have developed the soft x-ray laser beamline for surface processing and damage studies. The beamline is equipped with an intensity monitor, which provides the laser intensity focused on the sample surface. To derive the irradiation energy from the energy acquired by the intensity monitor, we have evaluated the characteristic features of the Mo/Si multilayer beam-splitter, and then estimated the relationship between the irradiation and detection intensities. The laser fluence provided by this beamline is high enough to create ablation structures on the material surfaces. We will present the performance of the Mo/Si multilayer beam-splitter and the details of the beamline.