2:30 PM - 2:45 PM
▲ [21p-C206-5] Characteristics of the extreme ultraviolet spectrum from a laser produced plasma
Keywords:EUV source, Laser produced plasma, EUV spectrometory
Laser produced plasma (LPP) is known for its high-power radiation in short wavelength region ranging from extreme ultraviolet (EUV) to vacuum ultraviolet (VUV). Such high-power source enables us to expand materials processing application, such as photo-lithography or direct machining. The emission from the LPP source generally have a wide range of spectrum. understandings and optimization of the spectrum is one of the key control knobs for efficient use. This study aims to understand the characteristics of the plasma spectrum in EUV to VUV region, and suggest optimum source parameters for each of possible application