[21p-C304-1~6] 4.2 Photonics Devices, Photonic Integrated Circuit and Silicon Photonics

▲ [21p-C304-3] A strong electro-optically active ferroelectric thin-film integrated on silicon

〇(DC)Mao Jiawei¹, Futa Uemura¹, Shiyoshi1 Yokoyama¹ (1.Kyushu Univ.)

Keywords:ferroelectric thin-film on insulator

In this abstract, a strong electro-optically active ferroelectric thin-film of 81 pm/V was successfully integrated on silicon wafer. This result is an important step toward a large-scale ferroelectric thin-film photonic integration, allowing for denser integration and lower power consumption.