The 83rd JSAP Autumn Meeting 2022

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[21p-C306-1~5] 7.2 Applications and technologies of electron beams

Wed. Sep 21, 2022 1:30 PM - 2:45 PM C306 (C306)

Masahiro Sasaki(Univ. Tsukuba)

2:15 PM - 2:30 PM

[21p-C306-4] Electron Emission from Planar-type Electron Source based on Nanocrystalline Silicon under Rough Vacuum

〇Hidetaka Shimawaki1, Masayoshi Nagao2, Katsuhisa Murakami2 (1.Hachinohe Inst.Tech., 2.AIST)

Keywords:electron emission device, planar type