[21p-P12-1~54] 17 Nanocarbon Technology(Poster)

▲ [21p-P12-22] Temperature dependence of CVD graphene nanomechanical resonator

〇(DC)Alexandro Nogueira¹, Shohei Enomoto¹, Manoharan Muruganathan¹, Afsal Kareekunnan¹, Masashi Akabori¹, Hiroshi Mizuta¹ (1.JAIST)

Keywords:Graphene, Mechanical resonator

Nanomechanical resonators were fabricated with chemical-vapor-deposited (CVD) graphene. The frequency response was analyzed in different bias and temperature conditions. It was observed that the resonance frequency decreases with increasing gate bias, showing the presence of a high built-in strain. Highly non-linear responses was observed in cryogenic temperatures, which can be partly attributed to higher strain in low temperatures.