[21p-P14-1~16] 2 Ionizing Radiation(Poster)

[21p-P14-6] Development of thin SiC radiation detector for precise linear energy deposition measurement of ionized particles

〇Yudai Arai^1,2, Kei Kubodera¹, Kouhei Yamaguchi¹, Ryou Yokota¹, Takumi Matsumoto¹, Takeshi Ohshima², Takahiro Makino², Sakai Makoto³, Akihiko Matsumura³, Wataru Kada¹, Norihiro Hoshino⁴, Hidekazu Tsuchida⁴ (1.Gunma Univ., 2.QST, 3.GHMC, 4.CRIEPI)

Keywords:Schottky barrier diode, SiC, Thin detector

We have proposed a dosimeter using 4H-SiC SBDs with excellent radiation tolerance and dose estimation and RBE estimation algorithms. Especially in micro regions, precise measurement of LET distribution requires miniaturization of the detector volume. Therefore, in this study, we aimed to realize a dosimeter with higher spatial resolution than existing detectors by thinning SiC semiconductors, which are wide bandgap semiconductors, and microfabricating the electrode structure. More detailed measurement results will be presented on the day.