4:00 PM - 6:00 PM
[21p-P16-11] Influence of Substrate Temperature on Crystalline Property of YSZ Thin Films Deposited at Low Temperature by Reactive Sputtering
Keywords:YSZ Thin Film, Reactive Sputtering, Low-temperature Deposition
Presentation information
Poster presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
[21p-P16-1~15] 6.4 Thin films and New materials
Wed. Sep 21, 2022 4:00 PM - 6:00 PM P16 (Arena)