[22a-A306-1~9] 11.4 Analog applications and their related technologies

[22a-A306-1] Investigation of deposition conditions of HoBa₂Cu₃O_7-δ high-T_C superconducting thin films for nanofabrication

〇Yuki Tottori¹, Kanji Hayashi¹, Ryo Ohtani¹, Seiichiro Ariyoshi¹, Saburo Tanaka¹ (1.Toyohashi Univ. of Technol.)

Keywords:high temperature superconductor, HoBCO, SQUID

In this study, we investigated the deposition conditions to obtain HoBCO thin films with high J_C and smooth film surface, which were deposited on SrTiO₃ substrate by PLD method. As a result, HoBCO thin films with high J_C and smooth film surface were obtained at deposition temperatures of 720 °C and annealing temperatures of 500 °C, which enable nanometer-accurate microfabrication. In the future, we will further reduce the micro-precipitats density to enable more complex nanometer-accurate microfabrication.