[22a-C101-1~11] CS.5 Code-sharing Session of 3.10 & 3.12

△ [22a-C101-6] Solid-state beam scanner with multi-wavelength slow-light VCSEL array

〇Shunsuke Kanja¹, Xiaodong Gu¹, Fumio Koyama¹ (1.Tokyo Tech, FIRST)

Keywords:VCSEL, solid-state optical sensing, beam scanner

We fabricated two types of non-mechanical beam scanner with multi-wavelength VCSEL array to extend the FOV and to improve the resplution points.We proposed a beam scanner array consisting of multi-wavelength VCSELs integrated in parallel or in series, and achieved almost doubling of the maximum deflection angle. The maximum deflection angle of nearly 12° was obtained for each of the prototype devices, and the maximum deflection angle can be further doubled by combining these structures to improve the number of resolution points.