[22a-C102-1~8] 22.1 Joint Session M "Phonon Engineering"

[22a-C102-8] Controlling and Understanding the Heat Conduction in Amorphous Film through Modulating Deposition Process

〇(P)Kunihiko Shizume¹, Ryohei Nagahiro¹, Michiko Sasaki^1,2, Masahiro Goto², Junichiro Shiomi¹ (1.UTokyo, 2.NIMS)

Keywords:Amorphous, Thermal conduction, Thermoreflectance

Metastable and amorphous phase thin films of Si_xN_y were deposited by combinatorial sputtering under various conditions. The thermal conductivities of the films were measured by the FDTR and TDTR methods. The results showed that the thermal conductivities differed among the Si_xN_y films. This suggests that the structures of the metastable and amorphous Si_xN_y depend on the deposition condition, affecting the thermal conductivity. Based on the results of TEM analysis, we will discuss the relationships between the thermal conductivity and the structure of metastable and amorphous phases of Si_xN_y.