[22a-C105-1~10] 12.3 Functional Materials and Novel Devices

[22a-C105-2] Detection of Trace Amounts of Moisture in Organic Solvents by a Membrane-type Surface Stress Sensor (MSS)

〇(DC)Tomohiro Murata^1,2, Kosuke Minami², Tomohiko Yamazaki^2,3, Nobuyuki Matsuki⁴, Genki Yoshikawa^2,5, Katsuhiko Ariga^1,2 (1.The Univ. of Tokyo, 2.NIMS, 3.Hokkaido Univ., 4.Kanagawa Univ., 5.Univ. of Tsukuba)

Keywords:nano mechanical sensor, membrane-type surface stress sensor (MSS), trace moisture

Highly sensitive detection of water in organic solvents is necessary not only in the research but also in the industry since water in organic solvents often causes yield loss in the chemical reactions of interest in organic synthesis. In this study, we developed a new method to detect trace amounts of water selectively and simply in organic solvents using a nanomechanical membrane-type surface stress sensor (MSS), which can detect mechanical deformation of the nanometer scale.