[22a-C201-1~10] 3.8 Terahertz technologies (formerly 3.9)

[22a-C201-3] Fabrication and evaluation of mid-infrared moth-eye anti-reflection structures on CdZnTe.

〇TAIKI EDA¹, Keito Tsukamoto¹, Ryota Kakihara¹, Yoshinori Shohmitsu², Toshihiro Nakaoka¹, Takehiko Wada², Takao Nakagawa² (1.Sophia Univ., 2.ISAS/JAXA)

Keywords:CdZnTe, moth-eye structure, Wet etching

The mid-infrared region (5-30 µm, 10-60 THz) corresponds to the fundamental vibration frequency of many molecules and has been widely studied from gas sensing application to infrared astronomy for understanding the formation and evolution of solid particles in space. In this study, we have fabricated a moth-eye structure on CdZnTe, which has high transmittance in the 10-18 µm wavelength range. by wet etching. Wet etching has the advantage of being less damaging and smoother surface than dry etching. We have demonstrated the anti-reflection effect of the moth-eye structure by FT-IR measurement and 3D simulation.