[22a-C201-1~10] 3.8 Terahertz technologies (formerly 3.9)

△ [22a-C201-4] Terahertz bandpass filter based on Babinet’s complementary double metal mesh and silicon subwavelength structure

〇Kasumi Miyata¹, Lisa Toyoshima¹, Yuka Goto¹, Chiharu Kashima¹, Koudai Iijima¹, Kaito Tanaka¹, Yoshinori Shohmitsu², Toshihiro Nakaoka¹, Takehiko Wada² (1.Sophia Univ., 2.ISAS/JAXA)

Keywords:bandpass filter, metal mesh, subwavelength structure

Metal mesh is a thin metallic film with squared apertures arranged periodically in a square lattice. It has been actively studied as bandpass filter and interference filter applications in the terahertz/infrared region. However, since Metal mesh is generally formed with thin metallic films, there are robustness issues. In this study, we report on the fabrication of a Babinet’s complementary double-structure metal-mesh bandpass filter with high robustness by Au deposition on silicon sub-wavelength structure.