[22a-C301-1~11] 3.6 Laser processing (formerly 3.7)

[22a-C301-11] Au₂O₃ pattern formation on Au substrate under the atmospheric condition by F₂ laser irradiation

〇Tsuyoshi Yoshida¹, Masayuki Okoshi¹ (1.NDA)

Keywords:VUV laser, surface modification, Au

Au which is known as the noblest metal are applied for various products including ornaments, electronic devices and optical elements. It was reported that Au₂O₃ has high work function and high redox potential, and is a thermally unstable. The formation of Au₂O₃ requires high oxidative agents or vacuum conditions for oxidative plasma. These properties may prevent the research of Au₂O₃ for various applications. In this work we propose a facile Au₂O₃ pattern formation process on Au substrate under atmospheric conditions and discuss the application of Au₂O₃ patterns.