[22a-P04-1~14] 8 Plasma Electronics(Poster)

[22a-P04-11] Search for process conditions for all solid state EC cell using InN as a coloration layer

〇Chika Sonehara¹, Kazuyz Murata¹, Yasusi Inoue¹, Osamu Takai² (1.Chiba Inst Technol., 2.Kanto Gakuin Univ.)

Keywords:EC, InN

Indium nitride (InN) thin films undergo color change due to an increase or decrease in the carrier density in InN due to the change of surface adsorption, and this phenomenon is called adsorption-induced electrochromic (AiEC) phenomenon. Since it can be expected as a new display device if the color change response time in the AiEC phenomenon can be reduced to ms order or less, we proposed an all-solid-state EC cell with a capacitor structure using InN as a discoloration layer that does not require a change of adsorbent, and searched for the necessary deposition conditions for each thin film layer.