[22p-A302-1~12] 11.1 Fundamental properties

[22p-A302-3] Fabrication of iron-based superconductor NdFeAs(O,H) micro-strips and evaluation of the transport properties

〇(M2)Atsuro Yoshikawa¹, Hiroya Imanaka¹, Hiroto Hibino¹, Takahiro Urata¹, Takafumi Hatano¹, Hiroshi Ikuta¹ (1.Nagoya Univ.)

Keywords:superconductor, Microfabrication

Superconductor-based single photon detectors (SSPD) exceed the performance of conventional photon detectors, except for the operation temperatures. Therefore, the realization of SSPD with high transition temperature (T_c) superconductors is of critical important for the industrial application. For this purpose, the submicron fabrication of the superconducting thin films at the order of ~100 nm, without the degradation of its superconducting properties, is inevitably necessary. In this study, we fabricated NdFeAs(O,H) thin films, one of the iron based superconductors which shows T_c ~ 56 K, into microstructures, and evaluated those transport properties. The results show that the T_c remains the same order as the as-grown films even after the microfabrication with the width of 1 µm.