Analysis of conductivity modulation of pn diodes fabricated on OVPE-GaN substrate

Shigeyoshi Usami; Hiroshi Ohta; Junichi Takino; Hirotaka Watanabe; Tomoaki Sumi; Masayuki Imanishi; Shugo Nitta; Yoshio Honda; Yusuke Mori; Tomoyoshi Mishima; Yoshio Okayama; Hiroshi Amano

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Oral presentation

13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[22p-B204-1~18] 13.7 Compound and power devices, process technology and characterization

Thu. Sep 22, 2022 1:30 PM - 6:15 PM B204 (B204)

Masashi Kato(Nagoya Inst. of Tech.)

4:30 PM - 4:45 PM

△ [22p-B204-12] Analysis of conductivity modulation of pn diodes fabricated on OVPE-GaN substrate

〇Shigeyoshi Usami¹, Hiroshi Ohta², Junichi Takino³, Hirotaka Watanabe⁴, Tomoaki Sumi³, Masayuki Imanishi¹, Shugo Nitta⁴, Yoshio Honda⁴, Yusuke Mori¹, Tomoyoshi Mishima², Yoshio Okayama³, Hiroshi Amano⁴ (1.Osaka Univ., 2.Hosei Univ., 3.Panasonic Holdings Corp., 4.IMaSS Nagoya Univ.)

Keywords:OVPE method, pn diodes, conductivity modulation