[22p-C202-1~12] 6.4 Thin films and New materials

[22p-C202-12] Effect of the Deposition Temperature on the Physical Properties of Polycrystalline Mn-Doped ITO Films Prepared by RF Magnetron Sputtering

〇Ryoto Kawamura¹, Saiki Kitagawa¹, Shintaro Takehisa¹, Toshihiro Nakamura^1,2 (1.Grad. Sch. Hum. Env. Stu., 2.ILAS, Kyoto Univ.)

Keywords:diluted magnetic semiconductor, transparent conductive film, spintronics materials

Diluted magnetic semiconductors are attracting attentions as spintronics materials that simultaneously utilize the charge and spin of electrons. Mn-doped indium tin oxide (Mn-ITO) thin films are diluted magnetic semiconductors in which a small amount of Mn is added to transparent conductive ITO films, and exhibit room temperature ferromagnetism in addition to high visible light transmission and low electrical resistivity. In this study, we investigated the effect of substrate temperature on the physical properties of polycrystalline Mn-ITO films prepared by RF magnetron sputtering. Different crystalline orientations were observed depending on the substrate temperature, and the consequent changes in electrical and magnetic properties were studied.