Atomic layer Etching of metal films by neutral cluster beam irradiation

Presentation information

Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.5

Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)

Hiroyuki Matsuzaki(University of Tokyo), Kousuke Moritani(兵庫県立大), Makiko Fujii(Yokohama National Univ.)

4:30 PM - 4:45 PM

〇Hideyuki Tanaka¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.Univ Hyogo)

Keywords:Atomic Layer Etching, neutral gas cluster beam