The 83rd JSAP Autumn Meeting 2022

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Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.5

[22p-C205-1~15] CS.1 Code-sharing Session of 2.3 & 7.5

Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)

Hiroyuki Matsuzaki(University of Tokyo), Kousuke Moritani(兵庫県立大), Makiko Fujii(Yokohama National Univ.)

4:45 PM - 5:00 PM

[22p-C205-12] GaN etching with reactive gas cluster injection

〇Toshio Seki1, Hiroki Yamamoto2, Kunihiko Koike3, Takaaki Aoki4, Jiro Matsuo1 (1.Grad. Sch. of Eng., Kyoto Univ., 2.QST, 3.Iwatani Corp., 4.Nagoya Univ.)

Keywords:cluster, neutral beam, semiconductor