The 83rd JSAP Autumn Meeting 2022

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Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.5

[22p-C205-1~15] CS.1 Code-sharing Session of 2.3 & 7.5

Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)

Hiroyuki Matsuzaki(University of Tokyo), Kousuke Moritani(兵庫県立大), Makiko Fujii(Yokohama National Univ.)

3:15 PM - 3:30 PM

[22p-C205-7] Investigation of low damage irradiation effect by GCIB irradiation on silicon nitride film

〇Masaya Takeuchi1, Reki Fujiwara1, Noriaki Toyoda1 (1.Univ. of Hyogo)

Keywords:cluster ion beam, XPS