3:45 PM - 4:00 PM
[22p-C205-9] Precise figuring using location specific processing of GCIB-ALE
Keywords:Atomic layer etching, gas cluster ion beam
Presentation information
Oral presentation
CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.5
[22p-C205-1~15] CS.1 Code-sharing Session of 2.3 & 7.5
Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)
Hiroyuki Matsuzaki(University of Tokyo), Kousuke Moritani(兵庫県立大), Makiko Fujii(Yokohama National Univ.)