The 83rd JSAP Autumn Meeting 2022

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Oral presentation

3 Optics and Photonics » 3.6 Laser processing (formerly 3.7)

[22p-C301-1~17] 3.6 Laser processing (formerly 3.7)

Thu. Sep 22, 2022 1:30 PM - 6:15 PM C301 (C301)

Yoichiroh Hosokawa(NAIST), Yasutaka Hanada(Hirosaki Univ.), Tsuyoshi Yoshida(National Defense Academy of Japan)

2:00 PM - 2:15 PM

[22p-C301-3] Formation of Al2O3 Thin Films by F2 laser

〇(M1)Satoshi Okuzono1, Tsuyoshi Yoshida1, Masayuki Okoshi1 (1.National Defense Academy)

Keywords:F2 laser, Al thin film, Al2O3 thin film