[22p-P13-1~28] 12.1 Fabrications and Structure Controls

[22p-P13-24] Preparation of vertically oriented aromatic polyester thin films by thermal chemical vapor deposition

〇Shuichiro Aida¹, Seiji Onohara², Ryosuke Matsubara¹, Yasuko Koshiba², Shohei Horike^2,3, Kenji Ishida², Atsushi Kubono¹ (1.Grad. Sch. of Int. Sci. and Tech., Shizuoka Univ., 2.Grad. Sch. of Eng., Kobe Univ., 3.JST PRESTO)

Keywords:aromatic polyester, piezoelectricity, molecular orientation

Aromatic polyester thin films with spontaneously aligned dipole moments along the film thickness direction are prepared by polycondensation of 4-acetoxybenzoic acid by thermal chemical vapor deposition. The molecular orientation and piezoelectric properties of the films is investigated.