The 83rd JSAP Autumn Meeting 2022

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Poster presentation

12 Organic Molecules and Bioelectronics » 12.1 Fabrications and Structure Controls

[22p-P13-1~28] 12.1 Fabrications and Structure Controls

Thu. Sep 22, 2022 4:00 PM - 6:00 PM P13 (Arena)

4:00 PM - 6:00 PM

[22p-P13-27] Improvement of Robustness of Fuluorosilane Films by Electron-Assisted Deposition

〇Hiroki Kojima1, Kuniaki Tanaka1, Hiroaki Usui1 (1.Tokyo Univ. Agricul & Technol)

Keywords:Thin Films