Improvement of CO2 Gas Sensitivity by Crystal Phase Transition of In2O3 TFT

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Fri. Sep 23, 2022 10:00 AM - 11:30 AM A401 (A401)

Yuzo Shigesato(Aoyama Gakuin Univ.)

10:00 AM - 10:15 AM

〇(M1)Ayumu Nodera¹, Shun Mori¹, Hiroki Nagai¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:TFT, CO2, sensor