[23a-C301-1~11] 3.6 Laser processing (formerly 3.7)

[23a-C301-11] First-principles calculation of energy transfer from a femtosecond laser pulse train to silicon

〇Daiju Horii¹, Mizuki Tani¹, Kato Hiroki¹, Yasushi Shinohara¹, Kenichi Ishikawa¹ (1.The Univ. of Tokyo)

Keywords:laser processing, femtosecond laser, burst mode

In this study, we focused on burst processing in the high intensity range of the laser processing process. We study the change in energy absorption and its mechanism when the number of pulses is increased while keeping the total pulse energy constant. The material is assumed to be Si, and simulations are performed based on time-dependent density functional theory (TDDFT) using the open source software SALMON.