9:30 AM - 11:30 AM
[23a-P06-1] Crystal growth of β-Ga2O3 thin film by APMOVPE using TEGa and O2 gas
Keywords:Ga2O3, MOVPE
Poster presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)
Fri. Sep 23, 2022 9:30 AM - 11:30 AM P06 (Arena)
9:30 AM - 11:30 AM
Keywords:Ga2O3, MOVPE