9:30 AM - 11:30 AM
[23a-P06-11] Growth of In doped MgZnO Films by Mist CVD Method
Keywords:MgZnO, Mist CVD, doping
Rocksalt-structured MgZnO alloys, which have ultra-wide bandgap, have attracted an attention because of being a candidate material for DUV and VUV emitter. To achieve n-type doping, In doped RS-MgZnO films were grown by mist CVD method.