[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-12] Photocurrent Spectra of Rocksalt-structured MgZnO Films in Vacuum UV Spectral Range

〇Hiroya Kusaka¹, Wataru Kosaka¹, Kotaro Ogawa^2,1, Kentaro Kaneko³, Tomohiro Yamaguchi¹, Tohru Honda¹, Shizuo Fujita³, Takeyoshi Onuma¹ (1.Kogakuin Univ., 2.ORC Manufacturing, 3.Kyoto Univ.)

Keywords:MgZnO, Vacuum UV, Photocurrent

Rocksalt-structured (RS) MgZnO alloys are good candidates for deep UV and vacuum UV emitters. Their absorption edge has been determined by the transmittance measurements, but undesired absorption in the MgO substrate has prevented the determination in the wavelength range below 190 nm. Therefore, in this study, we measured the photocurrent spectra for the RS-MgZnO films to evaluate the optical transitions in the VUV spectral range.