[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-6] Growth of single-crystalline ZnO films on lattice-mismatched sapphire substrates by RF magnetron sputtering using ZnON buffer layers

〇Ryo Mitsuishi¹, Kotaro Yataka¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga^1,2, Masaharu Shiratani¹, Naho Itagaki¹ (1.ISEE, Kyushu Univ., 2.NINS.)

Keywords:ZnO, Sputtering, heteroepitaxy