9:30 AM - 11:30 AM
[23a-P06-6] Growth of single-crystalline ZnO films on lattice-mismatched sapphire substrates by RF magnetron sputtering using ZnON buffer layers
Keywords:ZnO, Sputtering, heteroepitaxy
Poster presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)
Fri. Sep 23, 2022 9:30 AM - 11:30 AM P06 (Arena)
9:30 AM - 11:30 AM
Keywords:ZnO, Sputtering, heteroepitaxy