[23p-A202-1~16] 6.2 Carbon-based thin films

△ [23p-A202-2] Synthesis of n-type diamond using tert-butylphosphine for high sensitivity of the NV sensor

〇(M2)Riku Kawase¹, Hiroyuki Kawashima^1,2, Hiromitsu Kato², Norio Tokuda³, Mikihiro Kubota¹, Masahiko Ogura², Toshiharu Makino², Norikazu Mizuochi^1,4 (1.Kyoto Univ., 2.AIST, 3.Kanazawa Univ., 4.CSRN)

Keywords:diamond, NV center, n-type

Conventionally, Phosphine has been used for phosphorus doping of diamond by the CVD method, but it is highly toxic and explosive. In this study, n-type diamonds were synthesized by the CVD method with tert-butylphosphine, which is much less explosive and toxic than phosphine, and I confirmed long T₂ comparable to those obtained from samples synthesized with phosphine, n-type conductivity, and perfect alignment of the NV axis.