[23p-B101-1~13] 9.2 Nanoparticles, Nanowires and Nanosheets

△ [23p-B101-4] Low-power Acetone Sensors with Hydrothermally Synthesized (NH₄)_xWO₃ nanowire

〇(M1)Yuki Narita¹, Takahisa Tanaka¹, Ken Uchida¹ (1.Tokyo univ.)

Keywords:sensor, oxide semiconductor

Acetone is a biomarker for diabetes and there are some reports of acetone detection using WO3 nanowires. However, the resistance of WO₃ nanowires tends to be high, which makes device integration difficult because of the high power consumption . Therefore, (NH₄)_xWO₃, in which NH₄⁺ is doped at high concentration in WO₃ to reduce the resistance, was used as a device material. As a result, the resistance got about five orders of magnitude lower than that of conventional devices. Thanks to the low resistance, the temperature of nanowire can be easily raised by Joule-heating and the nanowire response to 100-ppm acetone was observed with low power consumption.