3:15 PM - 3:30 PM
[23p-B102-7] Process pressure dependence in direct-injection chemical vapor synthesis of diamond nano-powder by TiPS/Ar/H2 system
Keywords:nanoparticles, diamonds
The purpose of this study is to establish a new DNP synthesis method that does not require the separation, purification, and classification steps required to obtain diamond nanopowder (DNP).Gas phase synthesis of DNP using a microwave plasma torch was performed. By using triisopropylsilane (TiPS) as a raw material and Ar in addition to H2 as a plasma source, we aimed for stable synthesis in the gas phase centered on Si atoms. In the experiment, the displacement of the vacuum pump was adjusted, the pressure was changed to 43Torr, 52Torr, 61Torr, and the pressure dependence of the product was confirmed.