[23p-B102-1~8] 8.3 Plasma nanotechnology

[23p-B102-8] Mass spectrometry of Ar-diluted ammonia borane plasma for h-BN film formation

〇Takeshi Kitajima¹, Takuya Morihyo¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:plasma, h-BN, atomic film

In order to synthesize h-BN, an important insulating material in the field of two-dimensional electronics, it is necessary to analyze the reactive species in ammonia borane plasmas. BNH5 was identified as the active species generated in response to plasma irradiation. It is considered that the ammonia borane in the solid phase was destabilized by hydrogen desorption, leading to desorption.