[23p-C301-1~9] 3.6 Laser processing (formerly 3.7)

[23p-C301-3] Novel alloying method of Cu/Zn thin films by femtosecond laser irradiation

〇Taiyo Kawano¹, Makoto Yamaguchi², Tatsuya Okada¹, Takuro Tomita¹ (1.Tokushima Univ., 2.Akita Univ.)

Keywords:metal, femtosecond laser, alloy

The possibility of applying femtosecond laser irradiation to a novel metal alloying method was investigated. Zinc/copper thin films were evaporated on silicon carbide (SiC) and then the zinc/SiC interface was irradiated by femtosecond laser beam. Energy dispersive X-ray spectroscopy analysis was performed on the cross-section of the femtosecond laser irradiated area with a scanning transmission electron microscope.