The 69th JSAP Spring Meeting 2022

Exhibitors' information

[ブースNo.T-11] Heidelberg Instruments KK

Heidelberg Instruments is a world leader in the development and production of high precision photolithography system, maskless aligners and nanofabrication tools. Our systems are installed in industrial and academic facilities all over the world. These are used for direct writing and photomask production in various areas of MEMS/NEMS- for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many other related applications.