Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Mar 24, 2022 1:30 PM - 6:00 PM E103 (E103)
Yan Wu(Nihon Univ.), Katsunori Makihara(Nagoya Univ.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:30 PM - 1:45 PM
〇(M1)Kenshiro Horiuchi1, Takuma Sato1, Hiroaki Hanafusa1, Seiichirou Higashi1 (1.Hiroshima Univ.)
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1:45 PM - 2:00 PM
〇Jiawen Yu1, Keiya Fujimoto1, Kotaro Matsuguchi1, Takuma Sato1, Hiroaki Hanafusa1, Seiichirou Higashi1 (1.Hiroshima Univ.)
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2:00 PM - 2:15 PM
〇Tappei Nishihara1, Masatake Machida2, Atsushi Ogura1,3 (1.Meiji Univ., 2.ScientaOmicron Inc., 3.MREL)
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2:15 PM - 2:30 PM
〇Hiroshi Furuhata1, Haruto Saito2, Katsunori Makihara1, Akio Ohta1, Noriyuki Taoka1, Seiichi Miyazaki1 (1.Grad. Sch. of Eng., Nagoya Univ., 2.Sch. of Eng., Nagoya Univ.)
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2:30 PM - 2:45 PM
〇Hiroto Ishii1,2, Wen Hsin Chang2, Hiroyuki Ishii2, Mengnan Ke1, Tatsuro Maeda1,2 (1.TUS, 2.AIST)
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2:45 PM - 3:00 PM
〇(M1C)Hiroya Esaki1, Nobumitsu Hirose2, Akifumi Kasamatsu2, Toshiaki Matsui2, Yoshiyuki Suda3, Takahiro Tsukamoto1 (1.Univ. of Electro-Comm., 2.NICT, 3.Tokyo Univ. of Agric. & Technol.)
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3:00 PM - 3:15 PM
〇Toru Okatsugi1, Nagano Takahiro1, Kurashige Takayuki1, Katayama Keita1, Kakimoto Yoshiaki2, Nakamura Daisuke1, Goto Tetsuya3, Ikenoue Hiroshi1,2 (1.ISEE. Kyushu Univ., 2.Dept. GPI, Kyushu Univ., 3.Tohoku Univ.)
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3:15 PM - 3:30 PM
〇(M1)Masato Ooya1, Wenchang Yeh1, Yusaku Magari1 (1.Shimane Univ.)
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3:45 PM - 4:00 PM
〇(M1)Masataka Saito1, Gensai Tei1, Liu Long1, Yohei Koyanagi1, Daiki Sugawara1, Masahiro Watanabe1 (1.Tokyo Inst.)
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4:00 PM - 4:15 PM
〇(B)Yutaka Fujita1, Shoji Ishihara1, Katsuaki Tanabe1 (1.Kyoto Univ.)
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4:15 PM - 4:30 PM
〇Nobuo Sasaki1,2, Satoshi Takayama2, Yukiharu Uraoka2 (1.Sasaki Consulting, 2.NAIST)
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4:30 PM - 4:45 PM
〇Noboru Shimizu1, Yi Wang1, Keisuke Yamamoto1, Shiyu Zhang2, Osamu Nakatsuka2,3, Dong Wang1 (1.IGSES, Kyushu Univ., 2.GS of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)
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4:45 PM - 5:00 PM
〇Yuki Sawama1, Tatsuya Okada1 (1.Univ. of the Ryukyus)
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5:00 PM - 5:15 PM
〇Mitsuoki Hishida1, Kentaro Miyano1, Naohiko Kobata1, Masaki Nobuoka1, Takashi Noguchi2, Tatsuya Okada2 (1.Panasonic Smart Factory Solutions Co., Ltd., 2.Univ. of the Ryukyus)
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5:15 PM - 5:30 PM
Otokichi Shimoda1, Charith Jayanada Koswaththage1, Takashi Noguchi1, Takashi Kajiwara2, Taizoh Sadoh2, 〇Tatsuya Okada1 (1.Univ. Ryukyus, 2.Kyushu Univ.)
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5:30 PM - 5:45 PM
〇Satoshi Takayama1, Sasaki Nobuo1,2, Uraoka Yukiharu1 (1.NAIST, 2.Sasaki Consulting)
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5:45 PM - 6:00 PM
〇Sho Suzuki1, Keigo Tomizuka1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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