Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 25, 2022 9:30 AM - 12:00 PM E103 (E103)

Masato Sone(Tokyo Tech), Daisuke Yamane(Ritsumeikan Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 9:45 AM

△ [25a-E103-1] Cross-sectional shape effect of mechanical properties of micro-cantilevers made of Au single crystal

〇Ryohei Hori¹, Kazuya Fujita¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Hiroyuki Ito¹, Katsuyuki Machida¹, Yoshihiro Miyake¹, Masato Sone¹ (1.Tokyo Tech Inst.)

9:45 AM - 10:00 AM

△ [25a-E103-2] Micro-Mechanical Property Evaluation of Gold-Nickel Alloys Toward Design of MEMS Components

〇(M1)Takumi Akiyama¹, Yu-An Chien¹, Chun-Yi Chen¹, Tso Fu Mark Chang¹, Daisuke Yamane², Hiroyuki Ito¹, Katsuyuki Machida¹, Yoshihiro Miyake¹, Masato Sone¹ (1.Tokyo Tech, 2.Ritsumei Univ.)

10:00 AM - 10:15 AM

△ [25a-E103-3] A Study on High-Sensitivity MEMS Sensor Module for Micro Muscle Sound Measurement

〇Akira Onishi¹, Kohei Shibata¹, Akihiro Uchiyama¹, Katsuyuki Machida¹, Taiki Ogata¹, Noboru Ishihara¹, Hirotaka Uchitomi¹, Tso-fu Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

10:15 AM - 10:30 AM

△ [25a-E103-4] Evaluation of Device for High-Sensitivity MEMS Sensor Module

〇Akihiro Uchiyama¹, Kohei Shibata¹, Akira Onishi¹, Katsuyuki Machida¹, Taiki Ogata¹, Noboru Ishihara¹, Hirotaka Uchitomi¹, Tso-Fu Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

10:45 AM - 11:00 AM

[25a-E103-5] Dog Breath Analysis Using a Micropreconcentrator

〇Shinji Taga¹, Tadao Matsunaga¹, Takao Amaha², Yusuke Murahata², Yoshiharu Okamoto², Sang-Seok Lee¹ (1.Tottori Univ. Eng, 2.Tottori Univ. Agric)

11:00 AM - 11:15 AM

△ [25a-E103-6] A Study of MEMS Vibration Energy Harvesters with Self-Assembled Electrets

〇(BC)Reiki Sugimoto¹, Kosuke Kawashima², Hideyuki Kayaguchi³, Hisao Ishii^3,4,5, Yuya Tanaka^3,4, Daisuke Yamane^1,2 (1.Ritsumeikan Univ., 2.GSSE, Ritsumeikan Univ., 3.GSSE, Chiba Univ., 4.CFS, Chiba Univ., 5.MCRC, Chiba Univ.)

11:15 AM - 11:30 AM

△ [25a-E103-7] Trial on Microfabrication of Plastic Optical Fibers for Sensing Applications

〇(B)Yuki Hori¹, Heeyoung Lee², Yosuke Mizuno³, Daisuke Yamane¹ (1.Ritsumeikan Univ., 2.Shibaura Inst. Tech., 3.Yokohama National Univ.)

11:30 AM - 11:45 AM

△ [25a-E103-8] A Non-Contact Out-of-Plane Vibratory Energy Harvester with an Electric Double Layer Electret

〇(BC)Keigo Nota¹, Kentaro Tamura¹, Kazumoto Miwa², Shimpei Ono², Daisuke Yamane¹ (1.Ritsumeikan Univ., 2.Central Research Inst. of Electric Power Industry)

11:45 AM - 12:00 PM

[25a-E103-9] Evaluation of Transferred FDSOI Transistors and Logic Circuits for Flexible CMOS Image Sensors

〇Masahide Goto¹, Shigeyuki Imura¹ (1.NHK STRL)

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