Observation of parametric oscillation using a SiN ring resonator fabricated by hot-wire CVD method

Shota Sota, Koichiro Handa, Takasumi Tanabe, Yoshinori Uzawa, Kentaro Furusawa, Norihiko Sekine

Presentation information

Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics and integrated photonics

[22a-E303-1~9] 3.15 Silicon photonics and integrated photonics

Tue. Mar 22, 2022 9:30 AM - 12:00 PM E303 (E303)

Makoto Okano(AIST), Takasumi Tanabe(Keio Univ.)

9:45 AM - 10:00 AM

[22a-E303-2] Observation of parametric oscillation using a SiN ring resonator fabricated by hot-wire CVD method

〇Shota Sota^1,3, Koichiro Handa^1,3, Takasumi Tanabe¹, Yoshinori Uzawa², Kentaro Furusawa³, Norihiko Sekine³ (1.Keio Univ., 2.NAOJ, 3.NICT)

Keywords:microresonator, microcomb, silicon nitride

We achieved high Q factor (Q_int>5×10⁵) in a thick(>700 nm) SiN microring resonator fabricated by Hot-wire CVD method and observed parametric oscillation from it, by introducing a post-anneal process.