[22a-F408-1~6] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[22a-F408-3] [INVITED] Laser fabrication method for 3D complex silica glass

〇Shigeru Fujino¹ (1.Kyushu Univ. GIC)

Keywords:silica glass, additive manufacturing, laser fabrication method

Silica glass attracts considerable interest because of its excellent properties of low thermal expansion, chemical durability and mechanical strength, and high transmittance in the vacuum-ultraviolet to near-infrared region. As a result, silica glass is used for optical component, electric device, and IC photomask substrates, etc. However, it has been extremely difficult to process glass with ultra-precision and complex shapes. We have developed glass with complex shapes using 3D laser fabrication method.