[22p-E304-1~6] Imaging by using from visible light to X-rays - Exploring its versatility-

[22p-E304-4] X-ray photoelectron spectroscopy imaging ~operando spectromicroscopy analysis in device structures using synchrotron soft X-rays~

〇Naoka Nagamura^1,2,3 (1.NIMS, 2.JST PRESTO, 3.Tokyo Univ. of Science)

Keywords:XPS, imaging, operando

Spatial imaging analysis of charge transfer effects provide rich information for material and device design because the spatial nonuniformity at local interfaces significantly affect the device characteristics of micro devices. Here, we developed synchrotron soft X-ray operando scanning photoelectron microscopy system, called “3D nano-ESCA”, which makes it possible to perform XPS mapping analysis with high spatial resolution under bias voltage. We clarified the spatial distribution of interface charge transfer in device structures, such as transistors and Li-ion batteries. In the presentation, I will talk about the details of the 3D nano-ESCA system, application examples, and spectral analysis methods using machine learning.