[22p-E307-1~14] 12.3 Functional Materials and Novel Devices

[22p-E307-3] Design of Flexible Pressure Sensor with Layered Thin-Film Structure

〇Kei Okada¹, Tatsuhiro Hori¹, Toshinori Fujie¹ (1.Sch. Life Sci. and Tech., Tokyo Tech.)

Keywords:Bio-attachment sensor, Dielectric elastomer, Flexible device

Flexible sensor is expected to detect small deformation triggered by a blood pulse and movement of masseter muscle. In this study, we focus on the sensor design related to structure and material of the body-conformable pressure sensor. Practically, we investigated the responsiveness of applied pressure to the thin-film capacitor layered in the pressure sensor composed of silicone elastomer and Cr/Au spattered polyimide electrodes.