[22p-P06-1~23] 17 Nanocarbon Technology(Poster)

[22p-P06-1] Fabrication of Conductive Ultrananocrystalline Diamond Electrodes by Using Coaxial Arc Plasma Deposition

〇Hiroshi Naragino¹, Hiroki Hashiguchi¹, Tsuyoshi Yoshitake¹ (1.Interdiscip. Grad. Sch. Eng. Sci., Kyushu Univ.)

Keywords:Ultrananocrystalline diamond thin film, Coaxial arc olasma deposition, Electrochemical electrode

In this study, conductive ultrananocrystalline diamond thin films were deposited on Ti substrate by coaxial arc plasma deposition. The relationship between the chemical bonding structure of the thin films and their electrochemical properties was investigated.