[22p-P06-1~23] 17 Nanocarbon Technology(Poster)

[22p-P06-23] Improvement of Contact Property of TMDC-FET by Insertion of Self Assembled Organic Monolayer

Kohei Sakanashi¹, Mengnan Ke¹, 〇Nobuyuki Aoki¹ (1.Chiba Univ.)

Keywords:Transition-metal dichalcogenide, Ohnic contact, Organic monolayer

Transition-metal dichalcogenide has been attracted as a two-dimensional channel material in the future LSI circuit. However, but it is necessary to achieve highly-scalabile Ohmic contact method. We will report our plan how to achieve such a low contact resistance using an insertion of a self-assembled organic monolayer.