[23a-E205-1~10] 10.1 新物質・新機能創成（作製・評価技術）

▲ [23a-E205-10] Growth of the Mn₄N epitaxial film with the gradient and the cap and substrate dependence of the properties in the ultrathin region

〇Taro Komori¹、Haruka Mitarai¹、Tomohiro Yasuda¹、Takumi Horiuchi¹、Kaoru Toko¹、Takashi Suemasu¹ (1.Inst. Appl. Phys. Univ. Tsukuba)

キーワード：nitrides, MBE, ultrathin films