The 69th JSAP Spring Meeting 2022

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Oral presentation

CS Code-sharing session » 【CS.9】 Code-sharing Session of 13.7 & 15.6

[23a-E302-1~11] CS.9 Code-sharing Session of 13.7 & 15.6

Wed. Mar 23, 2022 9:00 AM - 12:00 PM E302 (E302)

Masashi Kato(Nagoya Inst. of Tech.)

11:45 AM - 12:00 PM

[23a-E302-11] Wet etching of gallium nitride using TMAH diluted by alcohol

〇(M2)Yushi Hamaya1, Moe Okamoto1, Satoko Shinkai1 (1.Kyushu Inst. Tech.)

Keywords:Gallium Nitride, GaN, etching